Diffusion furnace/CVD furnace temperature measurement
Various shapes of quartz protection tube thermocouples suitable for semiconductor manufacturing equipment
We offer quartz protection tube thermocouples that fit the shape of your diffusion furnace or CVD furnace. Loop solution for temperature control and monitoring
If it takes time for heat to be transferred from the heater in the furnace wall to the wafer, control becomes difficult. In such cases, the controllers must be configuration in a cascade, which can be achieved with Chino instrument. Furthermore, it is possible to centrally manage information from thyristors and controllers using a recorder.
Quartz protection tube thermocouples: Profile type thermocouples, L type thermocouples, spike type thermocouples
SB Series Controllers: Supports multi-zone control
Graphic recorder KR series: Centralized management via RS-485
Thyristor regulator JM series: Integrated type with setting display unit as standard
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