Semiconductor wafer resist stripper concentration meter

Conventional batch measurements using offline moisture meters
Changes in concentration go unnoticed, resulting in defective lots.
It is difficult to determine the deterioration of the stripping solution, making it unclear when to replace it.
There was also a potential risk of fire due to lack of moisture.
This product's real-time, in-line concentration monitoring improves safety, productivity, and costs.

Four reasons why you should choose us

Easy to install equipment
Easy installation on existing lines with separate fiber optics
On-site support
From sample testing to delivery attendance, essential support for in-line environments
A wide range of products
Model proposals tailored to the installation environment (visible hybrid, explosion proof)
Liquid reuse proposal
We can also propose a device that returns the liquid after measurement to the existing tank.

Proposed measurement management system

KRH.25023.Semicon regist kiquid

*Please download and check application examples.

PDF models | Technical data
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Supplementary Information

Application: Semiconductor manufacturing process
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Target process: Resist stripping process
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Main effects: Avoidance of fire risk, extension of liquid life, reduction of defects and stable quality

If you have any problems with temperature control,
 please feel free to contact us.

Membership
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