4 reasons why temperature measurement in the polishing process is important
Visualization of invisible temperature variations
Identifying the root cause of localized temperature rise during polishing that impairs flatness
Real-time anomaly detection
Instant detection of abnormalities during the process to prevent final inspection from being too late
Standardization turns intuition into science
By converting the senses of veterans into data, we have achieved quality control that can be reproduced by anyone.
Automatic optimization with temperature data
Automatic correction of polishing conditions based on temperature ensures optimal polishing conditions at all times
Proposed measurement system
Supplementary Information
Application: Semiconductor manufacturing process
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Target process: Wafer surface polishing process
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Main effect: Improved surface quality, improved yield
