Chapter 1
Why are semiconductors so important now?
Semiconductors are materials that possess properties intermediate between conductors, which conduct electricity, and insulation, which conduct very little electricity.
Semiconductor device, which are created by utilizing this property, are used to calculate and store electrical signals and control power.
AI Data Center
Semiconductors are used in processors and memory, which perform large amounts of calculations.
smartphone
Semiconductors support many functions, including computation, communication, cameras, and data storage.
Car
Semiconductors are used in many applications, including vehicle control, sensors, communications, and power control.
Factories and social infrastructure
Semiconductors are indispensable for industrial equipment, communication equipment, energy equipment, and more.
If you want to learn about semiconductors themselves, including their meaning and types, please see our basic article.
Chapter 2
How are semiconductors made?
Many precise manufacturing process are involved in creating a tiny semiconductor chip. Let's take a brief look at the overall picture.
Step 1
Making wafers
Crystals are created from high-purity silicon and other materials, and then processed into thin, disc-shaped forms. These discs are called "wafers."
Step 2
Forms a thin film
Thin films of semiconductors, insulation, conductors, etc., are formed on the wafer surface.
Step 3
Create a circuit pattern
By using light or other means, extremely fine circuit patterns are formed on the wafer.
Step 4
Remove unnecessary parts
In process called etching, the material is processed while leaving the necessary patterns intact.
Step 5
Creating electrical properties
The electrical properties of materials are adjusted through methods such as diffusion and ion implantation.
Step 6
Inspect and turn into a product
We inspect and isolate device on the wafer, and then perform the necessary connections and packaging.
In actual semiconductor manufacturing, these process are not simply performed once each. To create the necessary structure, device is formed by repeatedly going through process such as film deposition, exposure, and etching.
Chapter 3
The invisible condition of "temperature" comes into play here.
Semiconductor manufacturing involves process such as heating materials, inducing chemical reactions, and forming thin films.
In these process, temperature affects the reaction and state of the materials.
Therefore, the important thing is not simply to "get it hot."
Bring to the required temperature
Bring the temperature closer to the conditions required for the process.
Stabilize the temperature
It minimizes temperature fluctuations during processing, maintaining a repeatability state.
Understand temperature variations
Check to see if there are any temperature differences within the device or depending on the location of the object being examined.
Reproduce the same conditions
We record the manufacturing conditions so that the same conditions can be reproduced in the next process.
For more technical information on temperature control in semiconductor manufacturing, please refer to our specialized articles.
Chapter 4
In what process is temperature involved?
| process /equipment | Relationship with temperature |
|---|---|
| Manufacturing of silicon single crystals | We monitor and control the temperature during process of melting the raw materials and growing crystals. |
| Diffusion and heat treatment | Since wafers are processed in a high-temperature environment, measuring and control the furnace temperature is crucial. |
| Thin film deposition such as CVD | Since the film is formed using a chemical reaction, temperature control is necessary as one of the process conditions. |
| SiC crystal growth | To grow crystals in high-temperature environments, non-contact temperature measurement methods are being considered. |
| Equipment/equipment | Temperatures of various parts may be measured to monitor the condition of the device and ensure stable operation. |
Chapter 5
So, how do we measure that temperature?
There isn't just one method for measuring temperature in semiconductor manufacturing.
The most suitable method varies depending on the object being measured, the temperature range, whether contact is possible, and structure of the device.
Thermocouple
This is a contact-type temperature sensor used for a wide range of temperature measurements, including high temperatures. It is also used for temperature measurement in furnaces and other similar applications.
Resistance thermometer
This method measures temperature by utilizing the change resistance of materials such as platinum. It is used in situations where stable temperature measurement is required.
IR Thermometers
This method uses infrared radiation emitted from an object to measure its surface temperature without touching it. It is used for high-temperature objects or objects that are difficult to touch.
Learn more about contact type
Learn more about contactless technology
Chapter 6
The purpose of measuring temperature is not to "know the temperature."
Semiconductor factories measure temperature not just because they want to know the temperature itself.
What we really want to know is whether the manufacturing conditions are as intended, whether the same quality can be reproduced, and whether there are any signs of abnormalities.
| Measure | Understand the temperature state of the process. |
|---|---|
| Control | Approach the target temperature state. |
| Record | To allow for later verification of manufacturing conditions. |
| Monitor | To enable us to notice abnormalities and changes. |
| Calibration | Verify the reliability of the measurement values. |
The data obtained in this way becomes an important factor in making decisions about quality and yield.
How can we improve the yield in semiconductor manufacturing?
Why CHINO?
Why is Chino, a manufacturer of temperature measurement devices, talking about semiconductors?
The semiconductor industry is one of the most technologically advanced industries in the world.
In this context, Chino's role is not to manufacture semiconductors themselves.
It's the part of the manufacturing process that involves "accurately understanding the temperature."
At Chino, we support temperature measurement, control, and monitoring through products and services such as thermocouples and other radiation thermometer, recorders, controllers, monitoring systems, and calibration-related products.
For those who want to learn more about the relationship between semiconductors and temperature.
From here on, we will proceed to specialized articles according to your purpose.
Understanding Semiconductors
Let's delve deeper into temperature control.
Summary
Let's examine the evolution of semiconductors from the perspective of temperature.
Semiconductors are made by combining many advanced manufacturing technologies.
Within this context, temperature is involved in various aspects, including material reactions, heat treatment, film deposition, crystal growth, and the state of the equipment.
Behind glamorous technologies like AI and automobiles lie the painstaking technologies of "measuring," "control," "recording," and "monitoring."
When you look at semiconductors, be sure to also pay attention to the "temperature" behind them.
