Chapter 1
IR-CZ series for silicon single crystal pulling furnaces
In the manufacturing process of silicon single crystals, it is crucial to control the temperature while monitoring the crystal growth state. The IR-CZ series is radiation thermometer with video scope, designed to measure temperature by combining video and temperature data.
Product overview
The IR-CZ series allows you to measure radiation temperature while display video footage of the silicon solution in the crystal growth furnace and the crystal being pulled, along with its measurement position and state.
Because it allows you to select the object to be measured and check the observation conditions while taking measurements, it supports temperature measurement in the crystal pulling process.
Major features
Supports high temperatures up to 2000°C
This system supports temperature measurement for high-temperature crystal growth process.
Check video and temperature simultaneously
You can measure the radiation temperature while checking the condition of the object being measured using video footage.
Data storage and analyzing
Temperature data can be saved and reviewed/ analyzing later.
High-definition video
It supports 1.2-pixel video and assists in checking the condition of the object being measured.
Wiring-saving configuration
It supports a reduced wiring configuration through PoE hub connection.
Real-time display on PC
You can connect it to your PC and view video, temperature, and trend graphs.
Chapter 2
Temperature measurement in a silicon single crystal pulling furnace
In silicon single crystal pulling furnaces, it is necessary to measure the temperature while monitoring the crystal growth process.
The IR-CZ series allows you to not only view temperature data, but also to check the state and location of the object being measured using video footage.
| Information to check | What to check with the IR-CZ series |
|---|---|
| What to measure | Identify the object whose temperature you will be measuring, such as the silicon solution or the crystal being pulled. |
| Measurement location | We will check the measurement location and the condition of the object while reviewing the video footage. |
| Temperature | The temperature of the object is measured using radiation thermometer. |
| Time change | Temperature data can be saved and viewed/ analyzing as a trend. |
For a detailed explanation of temperature control in semiconductor manufacturing, please refer to "What is temperature control in semiconductor manufacturing?".
Chapter 3
System configuration and connection example
The IR-CZ series isn't just for standalone use; it can be combined with interfaces, networks, PCs, and other devices to display video, temperature, and trend graphs.
| configuration | Role |
|---|---|
| IR-CZ main unit | We will acquire video and radiation temperature data. |
| I/F converter | It is used as an interface between the main unit and connected devices. |
| PoE hub or RS-485 | The connection will be made according to the system configuration. |
| Power supply | Uses 24V DC. |
| PC | It display video, temperature, and trend graphs. |
Regarding the factory network and integration with high-order equipment, we will consider this after confirming the equipment configuration and communication conditions.
Further reading
Detailed information on the IR-CZ series
You can also check specifications and system configuration of the IR-CZ series in PDF format.
IR-CZ Series Documentation
This document is intended for those who want to learn more about radiation temperature measurements and system configuration in silicon single crystal pulling furnaces.
You can view the product overview on the webpage before accessing detailed documentation.
I would like to consult about temperature measurement in a silicon single crystal pulling furnace.
You can consider temperature measurement methods based on factors such as the object to be measured, the furnace configuration, the required temperature range, and whether or not video display and data storage are necessary.
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