Chapter 1

Superconductivity-based silicon single crystal pulling and cryogenic temperature monitoring

In silicon single crystal pulling, various techniques are used to stabilize the quality of the single crystal. The original page describes a method that uses the magnetic field lines of a superconducting magnet to limit thermal convection and suppress quality degradation such as an increase in oxygen concentration and crystal defects in the wafer.

Such devices require proper control of the low-temperature environment necessary for superconductivity to occur. Therefore, a temperature sensor capable of stable measurement in the low-temperature range is crucial.

This page focuses not on superconductivity technology itself, but on the cryogenic temperature resistance thermometer R800-6 and R800-7 used in its related applications.

Chapter 2

features of R800-6 and R800-7

The R800-6 and R800-7 are cryogenic temperature resistance thermometer that employ a platinum-cobalt dilute alloy as their temperature sensing element. A major features is that they can measure temperatures from cryogenic temperature range to room temperature range with a single sensor.

Wide range

Measurement from cryogenic temperature to room temperature

The R800-6 is compatible with temperatures from 4K to 375K, and the R800-7 is compatible with temperatures from 15K to 375K. You can select the model that matches the temperature range you will be using.

Comfort

high accuracy temperature measurement

With a tolerance of ±0.5 across the entire measurement range, it supports precise temperature measurement.

structure

Small heat capacity and robust

It has an ultra-thin metal capsule shape, resulting in a low heat capacity and a highly stability structure.

4-wire

Precision measurement using 4 wires

It employs a four-wire system and supports precise measurements using DC potentiometers and other instruments.

Calibration

Supports combination calibration

Dedicated indicators, recorders, and controllers are available, allowing for combined calibration with instrument at the He point.

Construction

structure designed for cryogenic temperature applications

It employs a spiral coil type alumina ceramic structure and a capsule-type protective structure.

Chapter 3

How do you choose between the R800-6 and the R800-7?

The basic selection point is the minimum required measurement temperature. If you need to measure down to around 4K, you can consider the R800-6; if measurement from 15K is sufficient, you can consider the R800-7.

Model Measurement temperature Selection guidelines
R800-6 4K to 375K If you want to measure up to around 4K
R800-7 15K to 375K When the main measurement range is 15K or higher

When making your selection, we recommend checking not only the required temperature range, but also the installation conditions, instrument to be used, the measurement method, and the calibration method.

Chapter 4

specifications of R800-6 and R800-7

Item Specifications
Temperature Sensitive Element Platinum-cobalt dilute alloy
Measurement temperature R800-6: 4K to 375K
R800-7: 15K to 375K
Resistance at 0℃ 100Ω±0.15Ω
Tolerance ±0.5
Specified current 1mA DC
Sensitivity Min 0.09Ω/K (at 12K) ~ Max. 0.40Ω/K
Repeatability Within 10mK
Temperature sensing section structure Spiral coil type alumina ceramic structure
Protective tube Capsule-shaped gold-plated brass, φ2 x 23mm
Lead 4-wire polyester-coated copper conductor, φ0.2 x L1000mm

For detailed specifications and the latest documentation, please refer to the product information for R800-6 and R800-7.

Chapter 5

How should we approach precision measurement and calibration?

In cryogenic temperature ranges, it is sometimes necessary to accurately measure even slight temperature changes. The R800-6 and R800-7 employ a four-wire design, enabling precise measurements using DC potentiometers and other devices.

Combination with measuring instruments

Dedicated indicators, recorders, and controllers are available for the R800-6 and R800-7. You can consider the entire configuration, including not only the sensor itself but also the measuring instruments.

Combined calibration at point He

Calibration combining sensors and instrument is possible at the He point. For measurement systems used in cryogenic temperature regions, it is important to consider not only the sensors but also instrument used for measurement and the calibration methods.

For a basic understanding of calibration, please see "What is calibration?".

I would like to consult about the selection of R800-6 and R800-7.

You can consider cryogenic temperature temperature sensors based on the required temperature range, measurement target, installation conditions, and instrument and calibration methods to be used.

Consult about technology and products

Related links

Related semiconductor measurement and temperature sensors

You can find information ranging from an overview of semiconductor measurement to related topics such as silicon single crystals, SiC crystals, and temperature sensors.

Understanding Semiconductor Measurement

Temperature measurement for crystal growth

Learn more about temperature sensors